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型號 GF100 / GF101 / GF120 / GF120XSL / GF120XSL / GF121高純度流路。GF100 系列金屬密封質量流量控制器和儀表性能：快速響應和可重現的高純度/純度過程氣體輸送。專為半導體、MOCVD 等其他氣體流量控制應用設計，GF100 系列可確保測量結果可重現并且長時間使用后性能依然高度穩定。一臺采用標準 MultiFlo™ 技術的 MFC 即可滿足數千種氣體類型和各種量程組合的需求，無需從氣路上拆除 MFC 并且不影響精度。結果：提高工藝靈活性和效率輔以業內高純度的過程氣體，有助于提高產率和生產效率。

型號	GF100	GF101	GF120	GF120XSL	GF120XSL	GF121
區別	High Purity	High Purity High Flow Rate	Ultra-High Purity Ultra-Fast Response Time	SDS Gas Delivery	SDS Gas Delivery	Ultra-High Purity High Flow Rate
流量范圍-滿量程容量	3 sccm – 55 slm	55 slm – 300 slm	3 sccm – 55 slm	>25 sccm?– 1 slm	4 – 25 sccm	55 slm – 300 slm
表面拋光	10μ inch Ra	10μ inch Ra	4μ inch Ra	4μ inch Ra	4μ inch Ra	4μ inch Ra
精度	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%	±1% S.P. > 35-100% ±0.35% F.S. 2-35%
重復性	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.	< ±0.15% S.P.
響應時間-常閉	Normally Closed <1 sec	Normally Closed <1 sec	Normally Closed 700 ms	Normally Closed <3 sec	Normally Closed <3 sec	Normally Closed <1 sec
響應時間-常開	Normally Open <1.5 sec	Normally Open —	Normally Open <1.5 sec	Normally Open —	Normally Open —	Normally Open —
多氣體多量程	MultiFlo™ Standard	MultiFlo™ Standard	MultiFlo™ Standard	—	—	MultiFlo™ Standard
瞬時壓力波動不敏感	—	—	—	—	—	—
診斷能力	Status Lights: MFC Health & Network Status Alarms: Control Valve Output & Network Interruption	Status Lights: MFC Health &?Network Status Alarms: Control Valve Output &?Network Interruption	Status Lights: MFC Health &?Network Status Alarms: Control Valve Output &?Network Interruption	Status Lights: MFC Health &?Network Status Alarms: Control Valve Output &?Network Interruption	Status Lights: MFC Health &?Network Status Alarms: Control Valve Output &?Network Interruption	Status Lights: MFC Health &?Network Status Alarms: Control Valve Output &?Network Interruption
模擬通訊	0-5 Vdc	0-5 Vdc	0-5 Vdc	0-5 Vdc	0-5 Vdc	0-5 Vdc
數字通訊	RS485?L Protocol DeviceNet™	RS485?L Protocol DeviceNet™	RS485?L Protocol DeviceNet™	RS485?L Protocol DeviceNet™	RS485?L Protocol DeviceNet™	RS485?L Protocol DeviceNet™

環境與氣象儀器

潔凈室儀器

HVAC及工業儀表